发明名称 IONIZATION APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide an ionization apparatus suitable for a mass spectrometry apparatus wherein deterioration of ionization efficiency can be repaired in a short period time, memory effect can be prevented and mass spectrometry can be accurately performed. SOLUTION: A metallic ion emitted form an ion discharge body 19 is adhered onto an introduced sample gas so that a sample gas ion is generated. The sample gas ion is injected to the mass spectrometry apparatus wherein one of or both of an electric field and a magnetic field are formed. The ion discharge body, for example, is used as an electrode for generating plasma for cleaning in an ionization area for generating the sample gas ions. The plasma is generated between a hollow container and the ion discharge body, and accumulated articles on components facing the ionizing area are removed by the plasma. The plasma cleaning process is continuously performed in suitable timing after the ionizing process.
申请公布号 JP2002298776(A) 申请公布日期 2002.10.11
申请号 JP20010096832 申请日期 2001.03.29
申请人 ANELVA CORP 发明人 SHIOKAWA YOSHIRO;NAKAMURA MEGUMI;SASAKI TORU;FUJII TOSHIHIRO
分类号 G01N27/62;G01N27/68;H01J49/04;H01J49/10;(IPC1-7):H01J49/10 主分类号 G01N27/62
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