| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a dicing device which can automatically update type information, such as a type number, etc., of a wafer to be treated without lowering an operation rate. SOLUTION: A bar-code reader, which reads bar-codes indicating type information and attached to a cassette in which a large number of wafers are contained, is provided at a prescribed position of a cassette housing unit in which the cassette is housed.</p> |
