| 摘要 |
PROBLEM TO BE SOLVED: To reduce the influence exerted upon an electrode, of the discharge of static electricity caused by the pyroelectricity of a piezoelectric substrate in the production process especially in the dicing process of a surface acoustic wave(SAW) device. SOLUTION: In this production method for SAW device by which an electrode is formed on the piezoelectric substrate and the substrate is divided into chips, conductive or semiconductive thin film treatment is applied to the electrode covered with a protective film and after the substrate is divided into chips, the protective film and a thin film are removed. For the conductive membrane, an aluminium thin film is used.
|
