APPARATUS FOR IMPLANTING FLUID

摘要

PURPOSE: An apparatus for implanting fluid is provided to obtain easily uniformity of fluid implanted on a substrate and change easily a direction of the fluid implanted to the substrate to clean and dry the substrate and minimize noise generated from the implantation process by using two tubes. CONSTITUTION: A fluid implantation apparatus(40) is formed with the first tube(410) and the second tube(420) in which the first tube(410) is inserted. The fluid implantation apparatus(40) has an implantation limit portion(430). The implantation limit portion(430) is installed at the both sides of the longitudinal direction of the first tube(410). The second implantation hole(430a) is formed by the implantation limit portion(430). The fluid is implanted through the second implantation hole(430a).