| 发明名称 |
SEMICONDUCTOR DEVICE |
| 摘要 |
PROBLEM TO BE SOLVED: To improve operation life characteristics of a semiconductor device. SOLUTION: A ratio B/A of an amplitude B to a period width A of roughness of the sidewall of a wiring groove is set to 0.2 and less.
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| 申请公布号 |
JP2002299280(A) |
申请公布日期 |
2002.10.11 |
| 申请号 |
JP20010096673 |
申请日期 |
2001.03.29 |
| 申请人 |
TOSHIBA CORP |
发明人 |
SHIMONISHI SATOSHI;SETA SHOJI;YOSHIDA YUKIMASA |
| 分类号 |
H01L21/28;H01L21/768;(IPC1-7):H01L21/28 |
主分类号 |
H01L21/28 |
| 代理机构 |
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