| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a boat for lateral heat treatment that can reduce slip transposition generated during heat treatment without reducing productivity, and to provide a heat treatment method. SOLUTION: In the boat 1 for lateral heat treatment ovens that supports a wafer 5 by four support bars 3, 3, 4, and 4 having grooves 3a and 4a and at the same time carries out heat treatment, an interval L between the support bars 3 and 3 that are positioned at the bottom section of the boat 1 for lateral heat treatment ovens is set so that a round section 6a of an orientation flat 6 of the wafer 5 comes into contact with a bottom surface 3b of each groove 3a.</p> |
