SEMICONDUCTOR SUBSTRATE DEVELOPER

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor substrate developer capable of uniformly developing a plurality of semiconductor substrates at the same time. SOLUTION: A motor 2 spins the plurality of semiconductor substrates mounted in a substrate hold tray 4. A pressure controller 10 controls the pressures of developing liquid and cleaning liquid sprayed for specified times from a developer liquid nozzle 8 and a cleaning liquid nozzle 7 disposed in the upper part of the semiconductor substrate.