| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for detecting the focus position of a projection optical system accurately, and an exposing method employing a projection optical system where the focus position is detected by the detecting method. SOLUTION: At the time of detecting the focus position of the projection optical system projecting a pattern PA, the pattern PA is projected through the projection optical system, an image of the projected pattern PA is picked up at at least two different positions in the direction of the optical axis of the projection optical system, and the focus position of the projection optical system is detected based on the length of the pattern PA thus picked up.
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