LIQUID CRYSTAL DISPLAY DEVICE AND ITS MANUFACTURING METHOD

摘要

PURPOSE: To provide a liquid crystal display device and its manufacturing method eliminated inferior display at the liquid crystal display by preventing etching residues at the formation of an ITO film onto a coated insulation film, reducing contact resistance between the ITO film and an underlayer metal film. CONSTITUTION: In the process of manufacturing the liquid crystal display device including a matrix of scan lines and signal lines arranged on a substrate, TFT connected to these lines and pixel electrodes connected to TFT with an applied interlayer insulation film, the temperature of the substrate at the formation of the transparent conductive film on the interlayer insulation film is regulated within 100-170°C. The transparent conductive film on the interlayer insulation film is formed without heating under the oxygen flow rate of 1% or less and annealed after the formation.