| 摘要 |
PROBLEM TO BE SOLVED: To reduce the thermal deformation of a beam as much as possible and to improve positioning precision when an electronic component is mounted. SOLUTION: A needle 13 generates heat by driving a Y-axis linear motor 7. Since a heat insulating member 21 having small heat conductivity is arranged between bases 20 and 20 at the right/left lower parts of the beam 6 and the needle 13, heat conduction from the needles 13 and 13 to the bases 20 and 20 of the beam 6 when the beam 6 is driven is suppressed to be less by the heat insulating member 21. The local temperature rise of the beam 6 is prevented, thermal deformation is avoided, and positioning precision when the electronic component is mounted is improved. |
