| 摘要 |
PROBLEM TO BE SOLVED: To provide a ceramic heater which can be manufactured at a relatively low cost, capable of maintaining evenness of the temperature of the heating face of the heater, when the electric current is sent and the heater is operated under an oxidizing atmosphere. SOLUTION: The ceramic heater 1A is made of ceramics and comprises a base 2 with the heating face 2a and a resistance heater 3, made of a metal of the aluminum group formed on the heating face 2a of the base 2.
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