| 摘要 |
PURPOSE: An apparatus and a method for mixing chemicals in a cleaning equipment are provided to supplement cleaning chemicals in a cleaning process by measuring density of the cleaning chemicals. CONSTITUTION: An auxiliary container(2-1) is formed at an upper side of an outer circumference of a cleaning bath(2) in order to collect chemicals overflown from the cleaning bath(2). An injection nozzle is installed at a lower side of an inside of the cleaning bath(2). The injection nozzle is connected with the auxiliary bath(2-1) by a circulating line(9) in order to supply the chemicals to the cleaning bath(1). A densimeter(5) and a chemical circulation pump(7) are installed on the circulating line(9) in order to measure density of the chemicals and circulates the chemicals. Circulating line opening/shutting valves(6,8) are installed at a front and a rear portion of the chemical circulation pump(7). A level sensor(4) is installed in the cleaning bath(2). The first, the second, and the third supply lines(17,18,19) are connected with the cleaning bath(2). The first pump(10) and an integrating flow meter(11) are installed in the first supply line(17). The second pump(13) and a switching valve(14) are installed in the second supply line(18). The third pump(15) and a switching valve(16) are installed in the third supply line(19).
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