| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide the transfer apparatus of a minute work that can accurately judge the quality of a suction state in the minute work for stably transferring the minute work, and to provide a method for transferring the minute work. SOLUTION: The transfer apparatus of the minute work picks up a minute chip 4 by vacuum suction for transferring to a specific position, has a flowrate change means for changing the suction flowrate of a vacuum suction means for carrying out vacuum suction from the suction nozzle between a first suction flowrate for suction retention and a second one for suction state detection, and judges a suction state in the chip 4 to a suction nozzle 8a based on the vacuum pressure detection result of a vacuum suction circuit in a state the suction flowrate is changed to the second one after the chip 4 is sucked and retained by the suction nozzle 8a, thus increasing difference in a vacuum pressure detection value due to the presence or absence of work suction, and accurately judging the suction state according to vacuum pressure even if a thin- diameter nozzle is used.</p> |
