| 摘要 |
PROBLEM TO BE SOLVED: To provide a plasma generator for generating plasma by microwave discharge, which has a proper plasma gas decomposition efficiency in use with a high gas pressure, is prevented from being damaged by heat stresses and has a simple and low-cost structure. SOLUTION: The generator is composed of a waveguide 2 for introducing microwaves and a chamber 4 connected to the waveguide 2 via a vacuum seal window 6. The chamber 4 is connected at the top end to a process chamber and has an E-plane width reduced at the top end of a discharge chamber 14. A plasma is generated in a radially reduced part A having a high electric field to decompose a gas G passing through the reduced part A, and the plasma is generated at a position distant from the vacuum seal window 6 sufficient for preventing this window from suffering from heat stress of the plasma. |
