| 摘要 |
PROBLEM TO BE SOLVED: To provide a processing apparatus which can readily obtain processing history, and an apparatus and method for accumulating information which can readily accumulate such a treatment history. SOLUTION: This apparatus includes a treatment apparatus body 101, equipped with a plurality of treatment units that perform prescribed treatment for a workpiece W and a conveying device that conveys the workpiece between the treatment units, a first control unit 103, which controls the whole processing apparatus including the conveying device, a second control unit, which controls the plurality of treatment units, an information accumulating unit 106, which takes a signal sent between the first control unit 103 and the second control unit 104 and accumulates its information, a detection means 107 for detecting the amount of information in the information accumulating unit 160, and information deleting mechanism 108, which compares a detection value of the detecting means 107 and the amount of information for subsequent treatment and deletes information of the information accumulating unit 106, when the free capacity of the information accumulating unit 106 is less than a prescribed value. |
