METHOD FOR MANUFACTURING THIN FILM TRANSISTOR LIQUID CRYSTAL DISPLAY

摘要

PURPOSE: A method for manufacturing a thin film transistor liquid crystal display is provided to remove a spacer distribution process in manufacturing a liquid crystal display and maintain regular cell gaps. CONSTITUTION: A method for manufacturing a thin film transistor liquid crystal display includes the steps of forming gate and data bus lines and applying a protective film on a glass board(50) on which a thin film transistor including a gate electrode, a gate insulating film(13), an active layer(5) and source and drain electrodes(3,7b) is formed, disclosing a predetermined part of the thin film transistor by etching the protective film; evaporating an ITO(Indium Tin Oxide) metal film on the protective film to be contacted with the disclosed thin film transistor; applying a photosensitive film on the ITO metal film and exposing the photosensitive film by using a halftone mask; forming a first photosensitive film pattern having a relatively thick halftone pattern and a second photosensitive film pattern without a halftone pattern; forming a pixel electrode(9) on a pixel area by etching the ITO metal film by using the first photosensitive film pattern as a mask; forming photosensitive film spacers(17) by removing the second photosensitive film pattern and making the halftone pattern of the first photosensitive film pattern remain at the same time.