| 摘要 |
<p>The present invention relates to microinterferometers. An embodiment of a microinterferometer (100) for accurately measuring the distance to an object surface (110) includes a substrate (152) and a tuneable, phase-sensitive, reflective diffraction grating (156) formed atop said substrate (152). The diffraction grating (156) is configured to reflect a first portion of an incident light and transmit a second portion of the incident light, such that the second portion of the incident light is diffracted. The diffraction grating (156) is further configured to be controllably adjusted. The microinterferometer (100) also includes a photodetector (120) for receiving interference patterns produced from the first portion of the incident light reflected from the diffraction grating (156) and the second portion of the incident lights reflected from the object surface (110). The microinterferometer (100) also includes a controller (170) coupled to the photo-detector (120) and the diffraction grating (156) for adjusting the diffraction grating (156), such that the interference patterns are altered. Systems and methods are also disclosed.</p> |
