发明名称 REINFORCED POLISHING PAD WITH A SHAPED OR FLEXIBLE WINDOW STRUCTURE
摘要 <p>An optical window structure (370) is disclosed. The optical window structure includes a support layer (330) that has a reinforcement layer (330b) and a cushioning layer (330a). In addition, the optical windows structure (370) has a polishing pad (102) which is attached to a top surface of the support layer. Furthermore, the optical window structure has an optical window opening (382) and a shaped optical window (372). The shaped optical window at least partially protrudes into the optical window opening in the support layer and the polishing pad during operation.</p>
申请公布号 WO2002078902(A1) 申请公布日期 2002.10.10
申请号 US2002009675 申请日期 2002.03.29
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