发明名称 Semiconductor device having electrostatic discharge protector and fabricating method thereof
摘要 The semiconductor device having electrostatic discharge protector includes a gate electrode on a first conductive type semiconductor substrate, a second conductive type source area in the semiconductor substrate at one lateral side of the gate electrode, and a second conductive type lightly doped drain area in the semiconductor substrate at the other lateral side of the gate electrode. A second conductive type heavily doped drain area is formed in a portion of the second conductive type lightly doped drain. The second conductive type heavily doped drain area is spaced from the gate electrode, to reduce/eliminate input capacitance of a high speed semiconductor device as well as improve an electrostatic discharge characteristic. A contact of conductive material forms an interface with the second conductive type heavily doped drain area that is recessed into the second conductive type heavily doped drain area.
申请公布号 US2002145165(A1) 申请公布日期 2002.10.10
申请号 US20010988756 申请日期 2001.11.20
申请人 YANG HAE CHANG 发明人 YANG HAE CHANG
分类号 H01L27/04;H01L21/336;H01L23/62;H01L27/02;H01L29/78;(IPC1-7):H01L23/62 主分类号 H01L27/04
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