METHOD FOR FABRICATING A THROUGH-WAFER OPTICAL MEMS DEVICE HAVING AN ANTI-REFLECTIVE COATING

摘要

An optical MEMS device is fabricated by micromachining a substrate (10) that has an antireflective coating (12A, 12B) on at least one surface. The micromachining process creates a microstructure that is movable and capable of interacting with an optical signal that is propagating through the substrate. A metal layer (14) is patterned to provide an electrical contact as means of actuating the movable microstructure. Also described is a method in which two substrate are bonded together form the optical MEMS device. Prior to the bonding of the two substrates, one substrate has an antireflective coating while the other substrate contains the movable microstructure.