Manufacturing method and apparatus for probe carriers

摘要

Method of manufacture of probe carriers in which plural kinds of probes are arranged on substrates by ejecting plural kinds of probe solutions containing probe materials specifically associable to target substances from a liquid ejecting device onto the substrates, wherein the probe solutions are ejected from the liquid ejecting device onto the substrates while a substrate holding part whereupon the substrates are placed is moved relative to the liquid ejecting device and a manufacturing apparatus exclusively used for the method. The present invention enables stable manufacture of probe carriers without overflow of the probe solutions from reservoirs in which probe substances are held.