| 摘要 |
Access to the interior of a substrate storage pod (22) in which substrates such as semiconductor wafers are stored is gained using an access device (20) provided within a micro environment enclosure (26). The access device (20) has a telescoping enclosure door (21) which, in an extended position, serves to close a port (28) of the enclosure (26) and seal the enclosure (26) from the outside. When access is desired, a translational motion assembly (36) grips the pod door (32) and pulls it into a recess (30) in the enclosure door (21). A transverse motion assembly (63) then pulls the enclosure door (21), along with the pod door (32) in the recess (30), to a contracted position such that the port (28) becomes unobstructed, permitting access to the interior of the substrate storage pod (22) from the enclosure (26). The process is reversed when access is to be terminated. |
