| 摘要 |
The piezoelectric drive has 2 groups of clamping piezopackets (3), each provided by a piezoelement stack, arranged between a reference part (1) and a driven part (2) and 2 groups of stepping piezopackets (4), each provided by a piezoelement stack extending in a perpendicular direction corresponding to the relative movement between the reference part and the driven part. Each clamping piezoelement acts against a semi-stiff bridge plate (5) at one end, compensating stack height differences.
|
