Device for sticking two substrates with inner holes to substrate wafer has second holder that rotates with shaft with centering part engaging substrate hole, can move axially along shaft's axis

摘要

The device has a first rotatable holder for holding the first substrate, a second rotatable holder for holding the second substrate and a drive for rotating one of the holding devices. The second holder is coupled so as to rotate with a rotatable shaft with a centering part that engages the inner hole of at least the second substrate and can move axially along the shaft's rotation axis.