| 摘要 |
A system for positioning a test head (110) for compliantly docking the test head with a prober, handler, or other peripheral includes a plurality of backdrivable linear actuators (414,416,418,420). Each actuator has a first end mechanically coupled to the test head (110) and a second end mechanically coupled to a manipulator. In a first mode, a control system applies inputs to the actuators for variably extending the actuators to establish a desired position of the test head relative to the support. In a second mode, the control system stops varying the input to the actuator, and the actuators (414,416,418,420) can be driven in compliance with external forces both forward and backward, providing only slight resistance to movement in both directions. The disclosed system for positioning a test head (110) is particularly useful for providing compliant docking with extremely heavy test heads(110). |
