AN APPARATUS AND METHOD FOR CREATING AN ULTRA-CLEAN MINI-ENVIRONMENT THROUGH LOZALIZED AIR FLOW AUGMENTATION

摘要

A method for creating a reduced particle environment in a localized area of a mechanically active transport interface is provided. The augmentation of the air flow results in a sweeping air flow to remove particles in and around the desired area. The augmented air flow will eliminate static or turbulent air flow regions and assist in removing potential particles from the vicinity of the substrate. This will prevent particles from being deposited on substrate thus fostering higher yields and improved quality.