| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of judging fault locations and a device for judging fault locations which can judge rotating members faulty in a device having a plurality of rotating members which rotate at different rotational speeds. SOLUTION: A chassis 2 of a substrate treating device 1, which has a plurality of rotating members 3, 3S, 3M, 4, 4S, 7S, 7M, 5, 5S, 9S, 9M, 6S and 6M, is provided with a vibration meter 15. The vibration meter 15 has a vibration acceleration sensor or a vibration speed sensor, and a fast Fourier transformation analyzer. When judging faults, the rotating members 3S (3, 3M), 4S (4), 7S (7M), 5S (5), 9S (9M) and 6S (6M) are rotated at different rotational speeds, and a vibration spectrum of the chassis 2 is obtained with the vibration meter 15. Rotating members which rotate at a rotational speed corresponding to a frequency of a maximum amplitude are judged faulty.
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