摘要 |
PURPOSE: To develop a high strength Fe-Ni-Co based or Fe-Ni based alloy strip for a flat mask which has excellent etching pierceability. CONSTITUTION: In an Fe-Ni-Co based alloy having a composition containing, by mass, 4.0 to 6.0% Co and 36.0 to 38.0% Ni+Co, and the balance Fe with inevitable impurities, or an Fe-Ni based alloy having a composition containing 35.0 to 37.0% Ni, and the balance Fe with inevitable impurities, 0.05 to 0.40% Nb is further incorporated, and the content of O as inevitable impurities is <=0.0050%. The composition of inclusions of a >=10 μm length present in the cross section parallel to the rolling direction before etching piercing consists of multiple oxide of niobium oxide and oxide containing at least one or more kinds selected from Al and Si.
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