| 摘要 |
PROBLEM TO BE SOLVED: To save the returning time of a stage by reconstructing data in the case of design inside an examination device without necessity to prepare the data again. SOLUTION: Data (chip data), with which design data are rectangular areas (chip areas) and data (layout data) for locating chips are defined. The layout data are composed of the locating positions and dimensions of respective chips and on the basis of conceptions the chip data are the set of a plurality of design stripes. Design stripe data are the set of cells and the cells are set of graphics. This method is composed of a column area preparing means 61 for fetching the design data and reconstituting the adjacent chip areas inside the design data into column area, stripe area preparing means 62 for dividing the column area into device stripe areas which can be scanned by once moving the stage, and a stripe data preparing means 63 for extracting the suitable unit information of hierarchical descriptions comprising the design data for each device stripe. |
