MANUFACTURING DEVICE AND MANUFACTURING METHOD FOR SUBSTRATE FOR LIQUID CRYSTAL DEVICE

摘要

PROBLEM TO BE SOLVED: To form the oriented film of uniform thickness without drying irregularities without unlimitedly prolonging leveling process time. SOLUTION: A substrate to which a polyimide solution is applied is left alone under a solvent atmosphere inside the casing of a leveling vessel 82 and leveled. A leveling state detection part 86 detects the state of the film irregularities of the oriented film by using a two-dimensional CCD. When the leveling state detection part 86 detects that a sufficient leveling state is attained, a process control part 87 outputs a control signal to a carrying mechanism and a palette 84 on which the substrate is mounted is moved to a drying furnace 83. Thus, a drying process is started. The start of the drying process is decided in accordance with the leveling state and the flat oriented film is obtained without unlimitedly prolonging manufacturing time.