TRANSPARENT ELECTROCONDUCTIVE FILM AND PROCESS FOR PRODUCING THE SAME

摘要

PURPOSE: A transparent electroconductive film and a process for producing the same are provided to produce an InSbO4-containing transparent electroconductive film having a high electroconductivity and a superior transparency. CONSTITUTION: A process for producing an InSbO4-containing transparent electroconductive film comprises the step of sputtering simultaneously a target(A) for sputtering, which comprises In, Sb and O, and whose atomic ratio of Sb/In is from 0.9 to 1.1, and a target(B) for sputtering, which comprises Sb.