| 摘要 |
PROBLEM TO BE SOLVED: To measure a pattern provided with a plurality of linear areas. SOLUTION: This device is provided with an image acquiring part 21 for acquiring the image of a fine pattern formed on a sample, an edge point extracting part 22 for extracting a plurality of edge points in the fine pattern from the image acquired by this image acquiring part, an edge point dividing part 23 for dividing a plurality of extracted edge points into a plurality of groups with a dividing point as a boundary and a form measuring part 24 for measuring the form of the pattern while using the edge points included in each of groups divided by this edge point dividing part. |
