| 摘要 |
PROBLEM TO BE SOLVED: To measure irregular images of a sample and electric current of a cantilever in contact mode, and perform measurement of a high bias voltage such as an electric field emission in lift mode without damaging a minute probe, the cantilever and the sample. SOLUTION: When measuring the irregular images of the sample 1 and electric images of the cantilever 7 in contact mode, a low bias voltage is applied to the sample 1 from a bias voltage switching circuit 10. By this, damage of the sample 1, the minute probe 6 and the like is prevented. Also, when measuring the electric field emission value by lift mode, the high bias voltage is applied to the sample 1 from the bias voltage switching circuit 10. Accordingly, the electric field emission images between the sample 1 and the minute probe 6 are securely obtained.
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