| 摘要 |
PROBLEM TO BE SOLVED: To provide a cooling water returning device capable of returning cooling water leaking from a seal part in a casing to a vacuum pump by utilizing the suction of the vacuum pump, eliminating shortage of cooling water, and maintaining consistent vacuum over a long time thereby. SOLUTION: A device fitted to the vacuum pump in which a suction chamber, an enclosing chamber and a discharge chamber are formed in the casing to cool the inside of the casing by introducing cooling water in the suction chamber comprises a lead pipe for guiding cooling water leaking from the seal part in the casing outside the casing, and a water returning pipe with one end connected to a tip part of the lead pipe and the other end communicated with and connected to the enclosing chamber or the suction chamber, and an atmosphere suction unit is provided on a connection part of the water returning pipe to the lead pipe.
|
