HIGHLY DURABLE QUARTZ GLASS, PREPARATION METHOD THEREOF, APPARATUS FOR MAKING THE GLASS, AND MEMBER AND APPARATUS USING THE GLASS

摘要

PURPOSE: A highly durable quartz glass, its preparation method and apparatus, a quartz glass member, and a semiconductor manufacturing device and a liquid crystal manufacturing device employing the member are provided, wherein the quartz glass is improved in durability, processability and transparency. CONSTITUTION: The quartz glass comprises 0.01-2 wt% of at least element selected from the group consisting of Mg, Ca, Sr, Ba, Y, Hf and Zr. The quartz glass is prepared by dropping the silica powder containing Zr into the furnace using an acid hydride salt as a heat source, layering it, and extending the layer outward. Also the quartz glass is prepared by passing the powder mixture of a silicate powder and the silica powder containing Zr through the plasma arc-coupling region where at least two plasma arcs are coupled and at least two electrodes have opponent polarity, or its neighborhood, thereby melting the mixture.