| 摘要 |
PROBLEM TO BE SOLVED: To provide a foreign matter display unit and a method for the same, enabling an efficient review of the foreign matter in a workpiece having already undergone the foreign matter inspection. SOLUTION: In this foreign matter display unit, a required foreign matter map is read out from and indicated as visible to the eye by a storage body for storing the foreign matter map that indicates the presence of any extraneous matter on the surface of the workpiece, an object to be inspected. In this display unit, plus the display of such a foreign matter map, one more is to indicate a prescribed review record of each already reviewed foreign substance of all the ones indicated on the map, at least, every one that has been nominated by an operator as an object to be reviewed.
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