COMPOSITION FOR PRODUCING SUBSTANCE WITH NANOPORE

摘要

PROBLEM TO BE SOLVED: To provide a composition for producing a substance with nanopores. SOLUTION: This composition for producing a substance with nanopores comprises a cyclodextrin derivative, a thermally stable organic or inorganic matrix precursor and a solvent. The substance produced from the above composition has pores each <=50Åin size which are uniformly dispersed throughout the substance, therefore enabling interlaminar insulation films used in semiconductors to be provided.