| 摘要 |
<p>The present invention provides a turbo molecular pump capable of suppressing temperature rise in an electronic circuit section within a range, without losing airtight property thereof with a simple construction. In a base section of a turbo molecular pump, a bottom portion thereof is sealed by a bottom cover. A semiconductor device is disposed at the inner portion of the bottom cover. A cooling member is provided, which is used for releasing heat of the semiconductor device in an airtight state outside the bottom cover.</p> |
