| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a flow sensor capable of mitigating or cutting off a thermal influence from a pedestal, preventing generation of a vortex and executing highly accurate measurement. SOLUTION: A passage forming member 6 is interposed between a flow detection element 7 where a temperature detection means 33 for detecting the temperature of a fluid 11 is mounted, and a metal pedestal 4. The passage forming member 6 is formed by die-cutting raw material comprising glass, ceramics, a synthetic resin or the like, having a small thermal expansion coefficient, and has a passage groove 15 for enabling passage of the fluid 11 and projecting parts 16 where the temperature detection element 7 is installed, on the upper face where the flow detection element 7 is joined.</p> |
