| 摘要 |
PROBLEM TO BE SOLVED: To provide a fine movable device preventing a movable electrode plate from being stuck to a fixed substrate by additionally forming an adhesion dissolving electrode further on the fixed substrate where a fixed electrode is formed. SOLUTION: In the fine movable device provided with a fixed electrode substrate 8 manufactured by a micromachining technique, where the fixed electrode 80 is formed, and the movable electrode plate 2 attached and connected to a fixed frame 1' through an anchor part 11 and a fracture 21 and displaced in a vertical direction to the fixed electrode substrate 8, the adhesion dissolving electrode 84 is additionally formed other than the fixed electrode 80 on the fixed electrode substrate 8. |
