| 摘要 |
PROBLEM TO BE SOLVED: To provide a penetration device (vacuum pipe), in which slide friction is not generated during linear move of a guided member, to dispense with lubrication. SOLUTION: In this penetration device of an insert member, a guide means for guiding the insert member 1 to be guided to an opening part 4 provided in a wall 5 of a vacuum chamber, maintains applied axial pressure along the whose circumference of an O-ring 11, to deform it so as to secure tightness; and when the insert member 1 is moved, deformation quantity is changed in the partial range of the O-ring 11.
|
