ENHANCED ETCHING/SMOOTHING OF DIELECTRIC SURFACES,申请号EP20000993156-传众专利搜索

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发明名称	ENHANCED ETCHING/SMOOTHING OF DIELECTRIC SURFACES
摘要
申请公布号	EP1247433(A2)	申请公布日期	2002.10.09
申请号	EP20000993156	申请日期	2000.12.05
申请人	EPION CORPORATION	发明人	DYKSTRA, JERALD P.;MOUNT, DAVID J., SR.;SKINNER, WESLEY J.;KIRKPATRICK, ALLEN R.
分类号	G21K1/087;H01J37/305;G21K5/04;H01J37/147;H01L21/302;H01L21/311;(IPC1-7):H05H1/00;C23C16/00	主分类号	G21K1/087
代理机构		代理人
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