| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of giving ceramic coating excellent in fusing affinity with surface of a quartz member to maximize energy efficiency by controlling energy release. SOLUTION: A ceramic coating layer is formed on a surface of the quartz tube 30, the surface of which is heated to fuse with a flame by injecting ceramic powder. The flame is obtained by mixing hydrogen gas and oxygen gas, the mixing ratio is formed so as to be 1:3.0-1:4.0 kg/cm<2> on a discharge pressure. Grain size of the ceramic powder is 20-100μm, ceramic powder is injected at a high temperature of 1200-1800 deg.C and thickness of the ceramic coating layer is 100-300μm thick.
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