X-RAY INSPECTION DEVICE AND METHOD

摘要

PROBLEM TO BE SOLVED: To provide an X-ray inspection device and its method, capable of decreasing the inspection time in the case where vertical photographing and slanting photographing are jointly conducted. SOLUTION: One orthogonal direction X-ray generator for irradiating X-rays to a joint part along the orthogonal direction to a circuit forming body is installed, and a slanting direction X-ray generator for irradiating X-rays to the joint part along the previously fixed slanting direction is also installed. Therefore, the time required for slanting the X-ray generator can be omitted, and the orthogonal X-ray generator and the slanting direction X-ray generator can be changed over in a shorter time than the conventional method. The inspection of the joint part in the circuit forming body can be conducted in a short time.