| 摘要 |
PURPOSE: To provide a method and a device for pattern evaluation and a recording medium with high speed, high accuracy, and high-added value. CONSTITUTION: Image data on a pattern to be evaluated is acquired and processed to detect the coordinates of the edge points of the pattern; the edge point pairs of right and left edge points are combined with each other, the distances between the edge points of the edge point pairs and angles between straight lines joining the edge points. To each other and an X-axis are calculated to prepare a distance and angle distribution chart showing the distribution of these distances and angles; and the characteristic points of the distance and angle distribution chart are extracted according to the purpose of evaluation. |
