Controller for RF power generator with reduced cable length sensitivity

摘要

A radio frequency (RF) power generator system (200) includes a power generator (102) that generates a RF power signal that is output to a load (106). The RF generator generates a forward power feedback signal (116) and a reverse power feedback signal (118). A controller (210) receives the forward power feedback signal (116) and the reverse power feedback signal (118). The controller generates a setpoint signal (124) that is output to the power generator (102). A setpoint modifier (204) receives the forward feedback signal (116), the reverse feedback signal (118) and an external setpoint signal (120). The setpoint modifier (204) calculates a forward power limit based on the forward and reverse power feedback signals (116,118). The setpoint modifier (204) outputs a modified setpoint signal (208) to the controller (210) based on one of the forward power limit and the external setpoint signal (120). The setpoint modifier (204) and the controller (210) can be integrated.