TEMPERATURE MEASURING DEVICE

摘要

PROBLEM TO BE SOLVED: To supply a temperature measuring device inexpensively featuring high sensitivity, fast response, small size, high precision, small change in characteristics with time, and high reliability. SOLUTION: One or more bipolar type transistors or MOSFET type transistors 10 are formed on a semiconductor thin film 15 heat-separated from a substrate 1. The transistor 10 is used as a transistor thermistor 103 and a temperature sensor 20, and heat generation by losses of a collector resistance or a drain resistance is used as a heater 30. Temperature is measured with the transistor thermistor 103 using the heat generation at the transistor 10. Peripheral circuits and the like of the transistors 10 are also integrated on the same substrate 1 according to need.