发明名称 Methods of forming electron emission devices
摘要 In one aspect, an electron emission device comprises a substrate, and a first layer supported by the substrate. The first layer comprises a conductive material. The electron emission display device further comprises an electron emission tip electrically connected with the first layer, and a second layer electrically disposed between the first layer and the electron emission tip. The second layer comprises microcrystalline silicon. In another aspect, the invention encompasses a method of forming an electron emission device. A substrate is provided, and a conductive layer is formed over the substrate. A microcrystalline-silicon-containing layer is formed over the conductive layer, and a resistor layer is formed over the microcrystalline-silicon-containing layer. An emitter tip is formed over the resistor layer. In yet other aspects, the invention encompasses field emission display devices, and methods of forming field emission display devices.
申请公布号 US6461211(B2) 申请公布日期 2002.10.08
申请号 US20010888125 申请日期 2001.06.22
申请人 MICRON TECHNOLOGY, INC. 发明人 RAINA KANWAL K.;DERRAA AMMAR
分类号 H01J1/304;H01J9/02;(IPC1-7):H01J9/24 主分类号 H01J1/304
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