发明名称 |
Vacuum processing apparatus |
摘要 |
A vacuum processing apparatus which includes a means for transferring wafer cassettes from a transferring chamber to a lock chamber. The wafer cassettes are mounted within a cassette table in a vertical direction and a first transferring means carries a wafer to and from the cassette tables. The vacuum processing apparatus further includes lock chambers into which the wafers are carried my the first transferring means. A second transferring means carries the wafers to either of the lock chambers.
|
申请公布号 |
US6460270(B2) |
申请公布日期 |
2002.10.08 |
申请号 |
US20010780394 |
申请日期 |
2001.02.12 |
申请人 |
HITACHI, LTD. |
发明人 |
KATO SHIGEKAZU;NISHIHATA KOUJI;TSUBONE TSUNEHIKO;ITOU ATSUSHI |
分类号 |
B01J3/00;B41J2/36;B41J2/365;C23C14/56;H01L21/00;H01L21/677;(IPC1-7):F26B13/30 |
主分类号 |
B01J3/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|