发明名称 Apparatus for etching glass substrate
摘要 An apparatus for etching a glass substrate 30 includes a first bath 13 containing an etchant, at least one porous panel having a plurality of jet holes 16 in the first bath, the porous panel containing the etchant to jet the etchant against the glass substrate, a container 20 storing the etchant, and a pump 24 supplying the etchant from the container to the porous panel, the pump being connected to the container and the porous panel.
申请公布号 US6461470(B2) 申请公布日期 2002.10.08
申请号 US19990368355 申请日期 1999.08.05
申请人 L.G. PHILIPS LCD CO., LTD. 发明人 KIM WOONG KWON
分类号 C03C15/00;H01L21/00;(IPC1-7):C03C15/00 主分类号 C03C15/00
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